Circuit Probe for Charged Particle Beam System

Circuit Probe for Charged Particle Beam System

A probe assembly can be connected and disconnected from its electrical harness within a vacuum chamber so that the probe assembly with the work piece mounted can be rotated and tilted without interference from a cable, and can then be reconnected without opening the vacuum chamber. Also described is...

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Hauptverfasser: BRUNDAGE PHILIP, BARENDS PAUL JOHANNES L, VAN DEN BOOGAARD MATHIJS P.W
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator BRUNDAGE PHILIP
BARENDS PAUL JOHANNES L
VAN DEN BOOGAARD MATHIJS P.W
description A probe assembly can be connected and disconnected from its electrical harness within a vacuum chamber so that the probe assembly with the work piece mounted can be rotated and tilted without interference from a cable, and can then be reconnected without opening the vacuum chamber. Also described is a means of grounding a sample and probes when the probe assembly is disconnected from its electrical harness and a means of preventing damage to the probe mechanism and the probe itself by ensuring that the probes are not sticking up too far during operations.
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Circuit Probe for Charged Particle Beam System
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