SELECTIVE REMOVAL OF A COATING FROM A METAL LAYER, AND SOLAR CELL APPLICATIONS THEREOF

SELECTIVE REMOVAL OF A COATING FROM A METAL LAYER, AND SOLAR CELL APPLICATIONS THEREOF

A method and resulting structure of patterning a metal film pattern over a substrate, including forming a metal film pattern over the substrate; depositing a coating over the substrate surface and the metal film pattern; and removing the coating over the metal film pattern by laser irradiation. The...

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Hauptverfasser: TURNER ADRIAN BRUCE, ONG QING YUAN, SCHULTZ-WITTMANN OLIVER
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator TURNER ADRIAN BRUCE
ONG QING YUAN
SCHULTZ-WITTMANN OLIVER
description A method and resulting structure of patterning a metal film pattern over a substrate, including forming a metal film pattern over the substrate; depositing a coating over the substrate surface and the metal film pattern; and removing the coating over the metal film pattern by laser irradiation. The substrate and coating do not significantly interact with the laser irradiation, and the laser irradiation interacts with the metal film pattern and the coating, resulting in the removal of the coating over the metal film pattern. The invention offers a technique for the formation of a metal pattern surrounded by a dielectric coating for solar cells, where the dielectric coating may function as an antireflection coating on the front surface, internal reflector on the rear surface, and may further may function as a dielectric barrier for subsequent electroplating of metal patterns on either surface.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title SELECTIVE REMOVAL OF A COATING FROM A METAL LAYER, AND SOLAR CELL APPLICATIONS THEREOF
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