SYSTEM AND METHOD FOR PROVIDING A SELF VALIDATING MASS FLOW CONTROLLER AND MASS FLOW METER

The disclosed embodiments include a method, apparatus, and computer program product for providing a self-validating mass flow controller or mass flow meter without requiring any software modification to a tool/tool controller in which the mass flow controller is being utilized. For example, the disc...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ELLEC CHRIS, VALENTINE BILL, LULL JOHN, KEHOE ANTHONY, BANARES BERWIN
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROLLING MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TESTING
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