VISIBLE LASER PROBING FOR CIRCUIT DEBUG AND DEFECT ANALYSIS

Visible laser probing is described. In one example a probe device has a laser configured to provide a laser beam at a visible wavelength, an objective lens positioned in front of the laser to focus the laser beam on an active region of an integrated circuit through a back side of an integrated circu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHYKIND DAVID, EILES TRAVIS M, GIRIDHARAGOPAL RAJIV
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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