MEMS DEVICE INCORPORATING A FLUIDIC PATH, AND MANUFACTURING PROCESS THEREOF

A MEMS device wherein a die of semiconductor material has a first face and a second face. A membrane is formed in or on the die and faces the first surface. A cap is fixed to the first face of the first die and is spaced apart from the membrane by a space. The die is fixed, on its second face, to an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VIGNA BENEDETTO, FARALLI DINO, CASTOLDI LAURA MARIA
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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