MICROWAVE HEATING APPARATUS AND HEATING METHOD

A microwave heating apparatus includes a phase control unit configured to change a phase of a standing wave of microwave introduced into the process chamber by the microwave introduction unit. The phase control unit includes a recessed portion with respect to an inner surface of the bottom wall. The...

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Bibliographische Detailangaben

Hauptverfasser:	YAMASHITA JUN, MIYAGAWA YOSHIHIRO, SHIMOMURA KOUJI, MONDEN TAICHI, HONG SEOKHYOUNG, IKEDA TARO, MOTOMURA YUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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