METHOD AND APPARATUS FOR IDENTIFYING ROOT CAUSE OF DEFECT USING COMPOSITE DEFECT MAP

Provided are a method and apparatus for automatically determining defective equipment by using a sample defect map showing defect distribution in each cell of a defective sample and production history information of each product, wherein the defective sample is a set of products, each being divided...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DOO MIN KYUN, SHIN KAE YOUNG
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING HANDLING RECORD CARRIERS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS
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