INSPECTION SYSTEM USING SCANNING ELECTRON MICROSCOPE

An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect of the inspection object by using an electron beam and including a vacuum chamber; a stage positioned bel...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM HYUN-JUNG, LEE JAE-KWON, JUNG DO-SOON, KIM JUNG-UN, GONG DONG-HYUN, PARK YOUNG-GIL, KIM GEUM-TAE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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