Methods for Confinement of Foam Delivered by a Proximity Head

A method suctions liquid from an upper surface of a substrate as the substrate is transported by a carrier under a head in a chamber. This operation is performed by the first section of the head. The method causes a first film of cleaning foam to flow onto the upper surface of the substrate as the s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KHOLODENKO ARNOLD, LIN CHENG-YU, MANDELBOYM MARK, TOMASCH GREG, HUSAIN ANWAR, GINZBURG LEON
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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