PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG
The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) compris...
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| creator | DIRKSEN PETER MARCELIS BOUT FRASER JOHN DOUGLAS DEKKER RONALD HENNEKEN VINCENT ADRIANUS LEEUWESTEIN ADRIAAN |
| description | The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10). |
| format | Patent |
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The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).</description><language>eng</language><subject>ACOUSTICS ; ACOUSTICS NOT OTHERWISE PROVIDED FOR ; DEAF-AID SETS ; ELECTRIC COMMUNICATION TECHNIQUE ; ELECTRICITY ; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS ; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL ; MUSICAL INSTRUMENTS ; PHYSICS ; PUBLIC ADDRESS SYSTEMS ; SOUND-PRODUCING DEVICES</subject><creationdate>2014</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140904&DB=EPODOC&CC=US&NR=2014247698A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76418</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140904&DB=EPODOC&CC=US&NR=2014247698A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>DIRKSEN PETER</creatorcontrib><creatorcontrib>MARCELIS BOUT</creatorcontrib><creatorcontrib>FRASER JOHN DOUGLAS</creatorcontrib><creatorcontrib>DEKKER RONALD</creatorcontrib><creatorcontrib>HENNEKEN VINCENT ADRIANUS</creatorcontrib><creatorcontrib>LEEUWESTEIN ADRIAAN</creatorcontrib><title>PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG</title><description>The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).</description><subject>ACOUSTICS</subject><subject>ACOUSTICS NOT OTHERWISE PROVIDED FOR</subject><subject>DEAF-AID SETS</subject><subject>ELECTRIC COMMUNICATION TECHNIQUE</subject><subject>ELECTRICITY</subject><subject>LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS</subject><subject>METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL</subject><subject>MUSICAL INSTRUMENTS</subject><subject>PHYSICS</subject><subject>PUBLIC ADDRESS SYSTEMS</subject><subject>SOUND-PRODUCING DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2014</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHAMCHLVdfb38XEMCHZ1UXB2DHB09gzxDHNV8PV0DvLX9XV09vD0A8qEBDn6BbuEOrsGKTi7-vgohHuGeCgE-IS68zCwpiXmFKfyQmluBmU31xBnD93Ugvz41OKCxOTUvNSS-NBgIwNDEyMTczNLC0dDY-JUAQB93yvl</recordid><startdate>20140904</startdate><enddate>20140904</enddate><creator>DIRKSEN PETER</creator><creator>MARCELIS BOUT</creator><creator>FRASER JOHN DOUGLAS</creator><creator>DEKKER RONALD</creator><creator>HENNEKEN VINCENT ADRIANUS</creator><creator>LEEUWESTEIN ADRIAAN</creator><scope>EVB</scope></search><sort><creationdate>20140904</creationdate><title>PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG</title><author>DIRKSEN PETER ; MARCELIS BOUT ; FRASER JOHN DOUGLAS ; DEKKER RONALD ; HENNEKEN VINCENT ADRIANUS ; LEEUWESTEIN ADRIAAN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2014247698A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2014</creationdate><topic>ACOUSTICS</topic><topic>ACOUSTICS NOT OTHERWISE PROVIDED FOR</topic><topic>DEAF-AID SETS</topic><topic>ELECTRIC COMMUNICATION TECHNIQUE</topic><topic>ELECTRICITY</topic><topic>LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS</topic><topic>METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL</topic><topic>MUSICAL INSTRUMENTS</topic><topic>PHYSICS</topic><topic>PUBLIC ADDRESS SYSTEMS</topic><topic>SOUND-PRODUCING DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>DIRKSEN PETER</creatorcontrib><creatorcontrib>MARCELIS BOUT</creatorcontrib><creatorcontrib>FRASER JOHN DOUGLAS</creatorcontrib><creatorcontrib>DEKKER RONALD</creatorcontrib><creatorcontrib>HENNEKEN VINCENT ADRIANUS</creatorcontrib><creatorcontrib>LEEUWESTEIN ADRIAAN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>DIRKSEN PETER</au><au>MARCELIS BOUT</au><au>FRASER JOHN DOUGLAS</au><au>DEKKER RONALD</au><au>HENNEKEN VINCENT ADRIANUS</au><au>LEEUWESTEIN ADRIAAN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG</title><date>2014-09-04</date><risdate>2014</risdate><abstract>The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | ACOUSTICS ACOUSTICS NOT OTHERWISE PROVIDED FOR DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL MUSICAL INSTRUMENTS PHYSICS PUBLIC ADDRESS SYSTEMS SOUND-PRODUCING DEVICES |
| title | PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG |
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