FLUID CONTROL DEVICE

Provided is a fluid control device which can shorten an assembling time by facilitating positioning of a line support member and can suppress the increase of a height of a portion which supports fluid control equipment. A base member is formed in a rectangular frame shape by an upper lateral frame m...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YOSHIDA TSUNEO, SHIKATA IZURU, NOJIMA SHINYA
Format: Patent
Sprache:eng
Schlagworte:
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