BACK SIDE ILLUMINATION (BSI) SENSORS, MANUFACTURING METHODS THEREOF, AND SEMICONDUCTOR DEVICE MANUFACTURING METHODS

Back side illumination (BSI) sensors, manufacturing methods thereof, and semiconductor device manufacturing methods are disclosed. In some embodiments, a method of manufacturing a semiconductor device includes providing a workpiece having a front side and a back side opposite the front side. An inte...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIN YU-KU, WU CHIN-NAN, LIN CHUN CHE, JANGJIAN SHIU-KO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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