ARC CHAMBER WITH MULTIPLE CATHODES FOR AN ION SOURCE

An apparatus for extending the useful life of an ion source, comprising an arc chamber containing a plurality of cathodes to be used sequentially and a plurality of repellers to protect cathodes when not in use. The arc chamber includes an arc chamber housing defining a reaction cavity, gas injectio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIN CHIN-TSUNG, WANG YEHIEH, CHOU HONG-HSING, HSIEH HSIAO-YIN, HUANG CHI-HAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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