PROCESS FOR THE PREPARATION OF TRISILYLAMINE FROM MONOCHLOROSILANE AND AMMONIA

The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant in which such a process can be carried out with advantage.

Bibliographische Detailangaben

Hauptverfasser:	RAULEDER HARTWIG, HOPPE CARL-FRIEDRICH, GOETZ CHRISTIAN, LUNT-RIEG INGRID
Format:	Patent
Sprache:	eng
Schlagworte:	AMMONIA CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF CYANOGEN INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
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