SOLAR CELL FORMATION APPARATUS AND METHOD

Apparatuses for forming material films on a solar cell substrate of substantially uniform thickness and processes for forming the same are disclosed. The process performed in the apparatuses is physical vapor deposition (PVD) in some embodiments. In one embodiment, an apparatus includes a specially...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YANG CHIH-JEN, TENG EDWARD, CHAO YINGN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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