METHODS AND APPARATUS FOR PROVIDING A GAS MIXTURE TO A PAIR OF PROCESS CHAMBERS

A method and apparatus for supplying a gas mixture to a load lock chamber is described. In one embodiment, the apparatus supplies a gas mixture to a pair of process chambers, comprising a first ozone generator to provide a first gas mixture to a first process chamber, a second ozone generator to pro...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CRUSE JAMES P, GOLD EZRA ROBERT, SALINAS MARTIN JEFFREY, LEE JARED AHMAD
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING PIPE-LINE SYSTEMS PIPE-LINES STORING OF DISTRIBUTING GASES OR LIQUIDS WEAPONS
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