THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME

A three-dimensional (3D) semiconductor memory device and a method for fabricating the same, the device including insulating layers stacked on a substrate; horizontal structures between the insulating layers, the horizontal structures including gate electrodes, respectively; vertical structures penet...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	EOM DAEHONG, KIM JINGYUN, YOO DONGCHUL, LEE WOOSUNG, NAM PHIL OUK, LEE WOONG, YANG JUNKYU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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