DISPERSIONS OF SUBMICRON DOPED SILICON PARTICLES

Methods are described that have the capability of producing submicron/nanoscale particles, in some embodiments dispersible, at high production rates. In some embodiments, the methods result in the production of particles with an average diameter less than about 75 nanometers that are produced at a r...

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Bibliographische Detailangaben
1. Verfasser: KAMBE NOBUYUKI
Format: Patent
Sprache:eng
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