ELECTRODE SENSOR AND METHOD OF FABRICATING THE SAME

Provide are an electrode sensor and a method of fabricating the same. the method may include providing a substrate with a first electrode, forming a resist layer on the substrate to cover the first electrode, patterning the resist layer to expose a portion of the first electrode, forming an insulati...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM YONG HEE, JUNG SANG DON, BAEK NAM SEOB, KIM GOOKHWA
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Provide are an electrode sensor and a method of fabricating the same. the method may include providing a substrate with a first electrode, forming a resist layer on the substrate to cover the first electrode, patterning the resist layer to expose a portion of the first electrode, forming an insulating layer on the substrate, removing the insulating layer on the resist layer and the resist layer to form a well in the insulating layer, and forming a second electrode in the well to be electrically connected to the first electrode. According to the method, it is possible to prevent the first electrode from being damaged. In addition, the second electrode may be configured have an increased surface area, and thus, the electrode can have low impedance.