APPARATUS AND METHOD FOR SUPPORTING A WORKPIECE DURING PROCESSING

An apparatus for supporting a workpiece during processing of the workpiece is disclosed. The apparatus comprises: a chassis having a vacuum chamber that is connectable to a vacuum source; a supporting device rotatable relative to the chassis, the supporting device having a hollow compartment and a s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHOW LAP KEI, CHENG CHI WAH, LEUNG CHI HANG
Format: Patent
Sprache:eng
Schlagworte:
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