Integration of Precision MIM Capacitor and Precision Thin Film Resistor

Integration of Precision MIM Capacitor and Precision Thin Film Resistor

An integrated circuit with a high precision MIM capacitor and a high precision resistor with via etch stop landing pads on the resistor heads that are formed with the capacitor bottom plate material. A process of forming an integrated circuit with a high precision MIM capacitor and a high precision...

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Hauptverfasser: CAMPBELL JOHN PAUL, MURPHY NEAL THOMAS, KHAN IMRAN MAHMOOD
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Sprache:eng
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ELECTRICITY
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creator CAMPBELL JOHN PAUL
MURPHY NEAL THOMAS
KHAN IMRAN MAHMOOD
description An integrated circuit with a high precision MIM capacitor and a high precision resistor with via etch stop landing pads on the resistor heads that are formed with the capacitor bottom plate material. A process of forming an integrated circuit with a high precision MIM capacitor and a high precision resistor where via etch stop landing pads over the resistor heads are formed using the same layer that is used to form the capacitor bottom plate.
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title Integration of Precision MIM Capacitor and Precision Thin Film Resistor
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