INTEGRATED CONTROLLER SOLUTION FOR MONITORING AND CONTROLLING MANUFACTURING EQUIPMENT

INTEGRATED CONTROLLER SOLUTION FOR MONITORING AND CONTROLLING MANUFACTURING EQUIPMENT

Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CAYER MAXIME, LOLDJ YOUSSEF A, TONG TONY H, CRAWFORD SHAUN W, CLARK DANIEL O, RIESKE ERIC
Format: Patent
Sprache:eng
Schlagworte:
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator CAYER MAXIME
LOLDJ YOUSSEF A
TONG TONY H
CRAWFORD SHAUN W
CLARK DANIEL O
RIESKE ERIC
description Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2013331973A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2013331973A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2013331973A13</originalsourceid><addsrcrecordid>eNqNirEKwjAQQLM4iPoPgc6CMYM4hnipgeRO07u5FImTaKH-P6IIrk6Px3tzJREZ2uIYDtoTcqGUoOiOknAk1IGKzoSRqURstcPf9vbsUILzLJ8KZ4mnDMhLNbsOt6muvlyoJgD747qOj75O43Cp9_rspdtujLXW7HfWGfvf9QKQSTIv</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>INTEGRATED CONTROLLER SOLUTION FOR MONITORING AND CONTROLLING MANUFACTURING EQUIPMENT</title><source>esp@cenet</source><creator>CAYER MAXIME ; LOLDJ YOUSSEF A ; TONG TONY H ; CRAWFORD SHAUN W ; CLARK DANIEL O ; RIESKE ERIC</creator><creatorcontrib>CAYER MAXIME ; LOLDJ YOUSSEF A ; TONG TONY H ; CRAWFORD SHAUN W ; CLARK DANIEL O ; RIESKE ERIC</creatorcontrib><description>Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.</description><language>eng</language><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL ; CONTROLLING ; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS ; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS ; PHYSICS ; REGULATING</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20131212&amp;DB=EPODOC&amp;CC=US&amp;NR=2013331973A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20131212&amp;DB=EPODOC&amp;CC=US&amp;NR=2013331973A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CAYER MAXIME</creatorcontrib><creatorcontrib>LOLDJ YOUSSEF A</creatorcontrib><creatorcontrib>TONG TONY H</creatorcontrib><creatorcontrib>CRAWFORD SHAUN W</creatorcontrib><creatorcontrib>CLARK DANIEL O</creatorcontrib><creatorcontrib>RIESKE ERIC</creatorcontrib><title>INTEGRATED CONTROLLER SOLUTION FOR MONITORING AND CONTROLLING MANUFACTURING EQUIPMENT</title><description>Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.</description><subject>CONTROL OR REGULATING SYSTEMS IN GENERAL</subject><subject>CONTROLLING</subject><subject>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</subject><subject>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</subject><subject>PHYSICS</subject><subject>REGULATING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNirEKwjAQQLM4iPoPgc6CMYM4hnipgeRO07u5FImTaKH-P6IIrk6Px3tzJREZ2uIYDtoTcqGUoOiOknAk1IGKzoSRqURstcPf9vbsUILzLJ8KZ4mnDMhLNbsOt6muvlyoJgD747qOj75O43Cp9_rspdtujLXW7HfWGfvf9QKQSTIv</recordid><startdate>20131212</startdate><enddate>20131212</enddate><creator>CAYER MAXIME</creator><creator>LOLDJ YOUSSEF A</creator><creator>TONG TONY H</creator><creator>CRAWFORD SHAUN W</creator><creator>CLARK DANIEL O</creator><creator>RIESKE ERIC</creator><scope>EVB</scope></search><sort><creationdate>20131212</creationdate><title>INTEGRATED CONTROLLER SOLUTION FOR MONITORING AND CONTROLLING MANUFACTURING EQUIPMENT</title><author>CAYER MAXIME ; LOLDJ YOUSSEF A ; TONG TONY H ; CRAWFORD SHAUN W ; CLARK DANIEL O ; RIESKE ERIC</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2013331973A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2013</creationdate><topic>CONTROL OR REGULATING SYSTEMS IN GENERAL</topic><topic>CONTROLLING</topic><topic>FUNCTIONAL ELEMENTS OF SUCH SYSTEMS</topic><topic>MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS</topic><topic>PHYSICS</topic><topic>REGULATING</topic><toplevel>online_resources</toplevel><creatorcontrib>CAYER MAXIME</creatorcontrib><creatorcontrib>LOLDJ YOUSSEF A</creatorcontrib><creatorcontrib>TONG TONY H</creatorcontrib><creatorcontrib>CRAWFORD SHAUN W</creatorcontrib><creatorcontrib>CLARK DANIEL O</creatorcontrib><creatorcontrib>RIESKE ERIC</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CAYER MAXIME</au><au>LOLDJ YOUSSEF A</au><au>TONG TONY H</au><au>CRAWFORD SHAUN W</au><au>CLARK DANIEL O</au><au>RIESKE ERIC</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>INTEGRATED CONTROLLER SOLUTION FOR MONITORING AND CONTROLLING MANUFACTURING EQUIPMENT</title><date>2013-12-12</date><risdate>2013</risdate><abstract>Methods and apparatus for controlling manufacturing equipment are provided herein. In some embodiments, a manufacturing system may include an integrated controller having one or more inputs to receive input values corresponding to operating information of at least one of a process tool, a mass flow controller or at least one sub-fab auxiliary system, wherein the integrated controller is configured to receive the input values, determine that an error condition is matched based on the received input values, and control the at least one sub-fab auxiliary system to operate at a fail-safe operating mode responsive to the determined error condition.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_US2013331973A1
source esp@cenet
subjects CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
title INTEGRATED CONTROLLER SOLUTION FOR MONITORING AND CONTROLLING MANUFACTURING EQUIPMENT
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-29T22%3A18%3A55IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=CAYER%20MAXIME&rft.date=2013-12-12&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2013331973A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true