PURGING OF POROGEN FROM UV CURE CHAMBER

A method for removing species from a substrate includes arranging a purge ring in a chamber proximate to a pedestal. The purge ring includes an inlet portion and an exhaust portion. The inlet portion defines an inlet plenum and an inlet baffle. The inlet baffle includes a continuous slit that is sub...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LAU STEPHEN YU-HONG, KAMIAN GEORGE D, SMARGIASSI EUGENE, XI MING
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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