Sensing Device

[Problem] To provide a small-sized, stable, and highly sensitive detection device by achieving an optical system which is the most suitable for an optical waveguide mode sensor using a spectral measurement method. [Solution] A detection device including: a detection plate in which a silicon layer an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAGATA KAZUTOSHI, AKIYAMA SHOJI, FUJIMAKI MAKOTO
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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