THIN FILM TRANSISTOR SUBSTRATE, DISPLAY DEVICE, AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR SUBSTRATE

THIN FILM TRANSISTOR SUBSTRATE, DISPLAY DEVICE, AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR SUBSTRATE

In a thin film transistor substrate (10) having an island-like channel protection layer (15a) covering a channel portion of an oxide semiconductor layer (14), a source electrode (16S) and a drain electrode (16D) are formed of an aluminum alloy film or a multilayer film including an aluminum alloy fi...

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1. Verfasser: KATOH SUMIO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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description In a thin film transistor substrate (10) having an island-like channel protection layer (15a) covering a channel portion of an oxide semiconductor layer (14), a source electrode (16S) and a drain electrode (16D) are formed of an aluminum alloy film or a multilayer film including an aluminum alloy film.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title THIN FILM TRANSISTOR SUBSTRATE, DISPLAY DEVICE, AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR SUBSTRATE
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