THIN FILM FORMING METHOD

A thin film forming method in which a thin film is formed on a surface of a target object to be processed to fill a recess formed in the surface of the target object includes the steps of forming a metal layer for filling on the surface of the target object to fill the recess formed in the surface o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HATANO TATSUO, YASUMURO CHIAKI, KATO TAKARA, YOKOYAMA OSAMU, GOMI ATSUSHI, KAWASAKI HIROAKI, ISHIZAKA TADAHIRO, RULLAN JONATHAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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