LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE MEDIUM THAT STORES COMPUTER PROGRAM FOR IMPLEMENTING LIQUID PROCESSING METHOD

A liquid processing apparatus 200 includes a pure water supply source 20; a pure water flow rate control opening/closing valve 27; a sulfuric acid supply unit 30; a sulfuric acid supply opening/closing valve 34; mixing tanks 11 and 12 configured to mix pure water and sulfuric acid to produce a mixed...

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Bibliographische Detailangaben
Hauptverfasser:	KOMIYA HIROSHI, ESHIMA KAZUYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL TRANSPORTING
Online-Zugang:	Volltext bestellen
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