LOW-COST TEMPERATURE AND PRESSURE SENSOR COMPRISING SAW RESONATORS, AND METHOD OF FABRICATION FOR SAME

A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type compri...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHOMMELOUX LUC, MENAGE PHILIPPE
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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