ELECTROSTATICALLY TRANSDUCED SENSORS COMPOSED OF PHOTOCHEMICALLY ETCHED GLASS

This disclosure provides systems, methods and apparatus for glass electromechanical systems (EMS) electrostatic devices. In one aspect, a glass EMS electrostatic device includes sidewall electrodes. Structural components of a glass EMS electrostatic device such as stationary support structures, mova...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	BLACK JUSTIN PHELPS, SHENOY RAVINDRA V, LASITER JON BRADLEY, STEPHANOU PHILIP JASON
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS PRINTED CIRCUITS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

container_end_page
container_issue
container_start_page
container_title
container_volume
creator	BLACK JUSTIN PHELPS SHENOY RAVINDRA V LASITER JON BRADLEY STEPHANOU PHILIP JASON
description	This disclosure provides systems, methods and apparatus for glass electromechanical systems (EMS) electrostatic devices. In one aspect, a glass EMS electrostatic device includes sidewall electrodes. Structural components of a glass EMS electrostatic device such as stationary support structures, movable masses, coupling flexures, and sidewall electrode supports, can be formed from a single glass body. The glass body can be a photochemically etched. In some implementations, pairs of sidewall electrodes can be arranged in interdigitated comb or parallel plate configurations and can include plated metal layers and narrow capacitive gap spacing.
format	Patent
fullrecord	<record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2013181893A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2013181893A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2013181893A13</originalsourceid><addsrcrecordid>eNrjZPB19XF1DgnyDw5xDPF0dvTxiVQICXL0C3YJdXZ1UQh29Qv2DwpWcPb3DfAPBgr4uykEePiH-Dt7uPpClbuGADkuCu4-jsHBPAysaYk5xam8UJqbQdkNJK-bWpAfn1pckJicmpdaEh8abGRgaGxoYWhhaexoaEycKgDtni-t</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>ELECTROSTATICALLY TRANSDUCED SENSORS COMPOSED OF PHOTOCHEMICALLY ETCHED GLASS</title><source>esp@cenet</source><creator>BLACK JUSTIN PHELPS ; SHENOY RAVINDRA V ; LASITER JON BRADLEY ; STEPHANOU PHILIP JASON</creator><creatorcontrib>BLACK JUSTIN PHELPS ; SHENOY RAVINDRA V ; LASITER JON BRADLEY ; STEPHANOU PHILIP JASON</creatorcontrib><description>This disclosure provides systems, methods and apparatus for glass electromechanical systems (EMS) electrostatic devices. In one aspect, a glass EMS electrostatic device includes sidewall electrodes. Structural components of a glass EMS electrostatic device such as stationary support structures, movable masses, coupling flexures, and sidewall electrode supports, can be formed from a single glass body. The glass body can be a photochemically etched. In some implementations, pairs of sidewall electrodes can be arranged in interdigitated comb or parallel plate configurations and can include plated metal layers and narrow capacitive gap spacing.</description><language>eng</language><subject>CALCULATING ; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ; COMPUTING ; COUNTING ; ELECTRIC DIGITAL DATA PROCESSING ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL ; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS ; MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; PHYSICS ; PRINTED CIRCUITS ; TESTING</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130718&DB=EPODOC&CC=US&NR=2013181893A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130718&DB=EPODOC&CC=US&NR=2013181893A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BLACK JUSTIN PHELPS</creatorcontrib><creatorcontrib>SHENOY RAVINDRA V</creatorcontrib><creatorcontrib>LASITER JON BRADLEY</creatorcontrib><creatorcontrib>STEPHANOU PHILIP JASON</creatorcontrib><title>ELECTROSTATICALLY TRANSDUCED SENSORS COMPOSED OF PHOTOCHEMICALLY ETCHED GLASS</title><description>This disclosure provides systems, methods and apparatus for glass electromechanical systems (EMS) electrostatic devices. In one aspect, a glass EMS electrostatic device includes sidewall electrodes. Structural components of a glass EMS electrostatic device such as stationary support structures, movable masses, coupling flexures, and sidewall electrode supports, can be formed from a single glass body. The glass body can be a photochemically etched. In some implementations, pairs of sidewall electrodes can be arranged in interdigitated comb or parallel plate configurations and can include plated metal layers and narrow capacitive gap spacing.</description><subject>CALCULATING</subject><subject>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</subject><subject>COMPUTING</subject><subject>COUNTING</subject><subject>ELECTRIC DIGITAL DATA PROCESSING</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>IMAGE DATA PROCESSING OR GENERATION, IN GENERAL</subject><subject>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</subject><subject>MEASURING</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>PHYSICS</subject><subject>PRINTED CIRCUITS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPB19XF1DgnyDw5xDPF0dvTxiVQICXL0C3YJdXZ1UQh29Qv2DwpWcPb3DfAPBgr4uykEePiH-Dt7uPpClbuGADkuCu4-jsHBPAysaYk5xam8UJqbQdkNJK-bWpAfn1pckJicmpdaEh8abGRgaGxoYWhhaexoaEycKgDtni-t</recordid><startdate>20130718</startdate><enddate>20130718</enddate><creator>BLACK JUSTIN PHELPS</creator><creator>SHENOY RAVINDRA V</creator><creator>LASITER JON BRADLEY</creator><creator>STEPHANOU PHILIP JASON</creator><scope>EVB</scope></search><sort><creationdate>20130718</creationdate><title>ELECTROSTATICALLY TRANSDUCED SENSORS COMPOSED OF PHOTOCHEMICALLY ETCHED GLASS</title><author>BLACK JUSTIN PHELPS ; SHENOY RAVINDRA V ; LASITER JON BRADLEY ; STEPHANOU PHILIP JASON</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2013181893A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2013</creationdate><topic>CALCULATING</topic><topic>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</topic><topic>COMPUTING</topic><topic>COUNTING</topic><topic>ELECTRIC DIGITAL DATA PROCESSING</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>IMAGE DATA PROCESSING OR GENERATION, IN GENERAL</topic><topic>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</topic><topic>MEASURING</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>PHYSICS</topic><topic>PRINTED CIRCUITS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>BLACK JUSTIN PHELPS</creatorcontrib><creatorcontrib>SHENOY RAVINDRA V</creatorcontrib><creatorcontrib>LASITER JON BRADLEY</creatorcontrib><creatorcontrib>STEPHANOU PHILIP JASON</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>BLACK JUSTIN PHELPS</au><au>SHENOY RAVINDRA V</au><au>LASITER JON BRADLEY</au><au>STEPHANOU PHILIP JASON</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ELECTROSTATICALLY TRANSDUCED SENSORS COMPOSED OF PHOTOCHEMICALLY ETCHED GLASS</title><date>2013-07-18</date><risdate>2013</risdate><abstract>This disclosure provides systems, methods and apparatus for glass electromechanical systems (EMS) electrostatic devices. In one aspect, a glass EMS electrostatic device includes sidewall electrodes. Structural components of a glass EMS electrostatic device such as stationary support structures, movable masses, coupling flexures, and sidewall electrode supports, can be formed from a single glass body. The glass body can be a photochemically etched. In some implementations, pairs of sidewall electrodes can be arranged in interdigitated comb or parallel plate configurations and can include plated metal layers and narrow capacitive gap spacing.</abstract><oa>free_for_read</oa></addata></record>
fulltext	fulltext_linktorsrc
identifier
ispartof
issn
language	eng
recordid	cdi_epo_espacenet_US2013181893A1
source	esp@cenet
subjects	CALCULATING CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS PRINTED CIRCUITS TESTING
title	ELECTROSTATICALLY TRANSDUCED SENSORS COMPOSED OF PHOTOCHEMICALLY ETCHED GLASS
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-16T16%3A15%3A43IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=BLACK%20JUSTIN%20PHELPS&rft.date=2013-07-18&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2013181893A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true