SUBLIMATION PUMP AND METHOD

A vacuum pump may comprise a grating, and a sublimation element. The grating may have a grating opening and a grating interior that may be bounded by at least one grating surface. The sublimation element may be located within the grating interior and may be configured to sublimate and form a reactiv...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: MCIVER CARL R
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!