System and Methods for Semiconductor Device Performance Prediction During Processing

Methods and systems for predicting semiconductor device performance criteria during processing. A method is described that includes receiving a semiconductor wafer; performing semiconductor processing on the semiconductor wafer forming active devices that, when completed, will exhibit a device perfo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHEN CHAOI, HUANG YALING, WANG JEN-PAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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