APPARATUS AND METHOD FOR DETECTING THE SURFACE DEFECT OF THE GLASS SUBSTRATE

The apparatus for detecting surface defects of a glass substrate, having a dark field optical system, includes: a first photographing device for photographing first image; a second photographing for photographing second image; a dark field illumination system disposed below the glass substrate for s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KWON JAEHOON, BOCK ANDREAS, LOHSE ERIK, KEEM TAEHO, JUNG JIHWA, VOITEL MARKO, HWANG GYUHONG, KEMMANN MARK
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION TESTING
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