CRYSTALLINITY EVALUATION METHOD, CRYSTALLINITY EVALUATION DEVICE, AND COMPUTER SOFTWARE THEREOF

A crystallinity evaluation method of evaluating crystallinity of a semiconductor film formed above a substrate includes following steps. First, a peak waveform of a Raman band in a Raman spectrum of the semiconductor film is obtained using Raman spectrometry. The Raman band corresponds to a phonon m...

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Hauptverfasser:	KAWASHIMA TAKAHIRO, ODA TOMOHIKO, KAWACHI GENSHIROU, NISHITANI HIKARU
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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