SEMICONDUCTOR DEVICE

A semiconductor device, which exhibits an increased design flexibility for a capacitor element, and can be manufactured with simple method, is provided. A semiconductor device 100 includes: a silicon substrate 101; an interlayer film 103 provided on the silicon substrate 101; a multiple-layered inte...

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Bibliographische Detailangaben
1. Verfasser: OKAMURA RYUICHI
Format: Patent
Sprache:eng
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