MASKLESS PROCESSING APPARATUS
Disclosed herein is a maskless processing apparatus including: an illumination optical system providing light illuminated to a substrate; a spatial light modulator (SLM) including a plurality of light conversion devices and controlling corresponding light conversion devices to selectively reflect or...
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| creator | NA GI LYONG |
| description | Disclosed herein is a maskless processing apparatus including: an illumination optical system providing light illuminated to a substrate; a spatial light modulator (SLM) including a plurality of light conversion devices and controlling corresponding light conversion devices to selectively reflect or transmit the light illuminated from the illumination optical system according to a processing pattern, thereby converting a light amount; a projection optical system arranged so that the plurality of light conversion devices collect light corresponding to a single pixel of the substrate and projecting high energy light provided by the plurality of corresponding light conversion devices to a corresponding pixel when the light converted from the SLM is input; and a controller controlling the SLM to receive the processing pattern and selectively convert the light illuminated from a light source through the plurality of light conversion devices according to the received processing pattern. A digital mask is used, thereby reducing a use cost of a mask, easily taking active action against a change in scale of a product to be processed, and increasing the utilization of maskless processing apparatus. |
| format | Patent |
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A digital mask is used, thereby reducing a use cost of a mask, easily taking active action against a change in scale of a product to be processed, and increasing the utilization of maskless processing apparatus.</description><subject>ACCESSORIES THEREFOR</subject><subject>APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES</subject><subject>APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PHOTOGRAPHY</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2012</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJD1dQz29nENDlYICPJ3BtKefu4KjgEBjkGOIaHBPAysaYk5xam8UJqbQdnNNcTZQze1ID8-tbggMTk1L7UkPjTYyMDQyNjQxNDS3NHQmDhVADNtIkU</recordid><startdate>20121213</startdate><enddate>20121213</enddate><creator>NA GI LYONG</creator><scope>EVB</scope></search><sort><creationdate>20121213</creationdate><title>MASKLESS PROCESSING APPARATUS</title><author>NA GI LYONG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2012314197A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2012</creationdate><topic>ACCESSORIES THEREFOR</topic><topic>APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES</topic><topic>APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM</topic><topic>CINEMATOGRAPHY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PHOTOGRAPHY</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>NA GI LYONG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NA GI LYONG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MASKLESS PROCESSING APPARATUS</title><date>2012-12-13</date><risdate>2012</risdate><abstract>Disclosed herein is a maskless processing apparatus including: an illumination optical system providing light illuminated to a substrate; a spatial light modulator (SLM) including a plurality of light conversion devices and controlling corresponding light conversion devices to selectively reflect or transmit the light illuminated from the illumination optical system according to a processing pattern, thereby converting a light amount; a projection optical system arranged so that the plurality of light conversion devices collect light corresponding to a single pixel of the substrate and projecting high energy light provided by the plurality of corresponding light conversion devices to a corresponding pixel when the light converted from the SLM is input; and a controller controlling the SLM to receive the processing pattern and selectively convert the light illuminated from a light source through the plurality of light conversion devices according to the received processing pattern. 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| subjects | ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHOTOGRAPHY PHYSICS |
| title | MASKLESS PROCESSING APPARATUS |
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