OBSERVATION METHOD AND OBSERVATION DEVICE

With respect to a charged particle beam device, the step size of focal point measure for executing autofocusing is optimized to a value that is optimal with respect to the spread of an approximation curve for a focal point measure distribution. The step size of focal point measure for executing auto...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OBARA KENJI, BAN NAOMA
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY PICTORIAL COMMUNICATION, e.g. TELEVISION
Online-Zugang:	Volltext bestellen
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