QUADRUPOLE MASS SPECTROMETER

A quadrupole mass spectrometer for use in analyzing gas components in a test piece is made in a constitution in which resistance heating of a grid is materialized, and in which a high-accuracy analysis of the gas components is possible at a low cost while preventing the sensitivity from lowering. A...

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Bibliographische Detailangaben
Hauptverfasser: KUROKAWA YUUJIROU, NAKAJIMA TOYOAKI, TANAKA RYOTA, YURI TSUTOMU
Format: Patent
Sprache:eng
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