AMINOSILANES AND METHODS FOR MAKING SAME

Aminosilanes, such as diisopropylaminosilane (DIPAS), are precursors for the deposition of silicon containing films such as silicon-oxide and silicon-nitride films. Described herein are methods to make these aminosilanes as well as intermediate compounds such as haloaminosilane compounds having the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEHMANN JOHN FRANCIS, WITHERS, JR. HOWARD PAUL
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM CHEMISTRY METALLURGY ORGANIC CHEMISTRY
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