Method for employing titania nanotube sensors as vacuum gauges

A method by which titania, or other composition, nanotube arrays, grown anodically or otherwise, can be made to meter vacuum pressure through hydrogen absorption has been discovered. The nanotube array (203) is fixed onto a demountable or permanently affixed flange, through which electrical current...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BIERMAN JOHN C, MULHOLLAN GREGORY A, KIRBY ROBERT E
Format: Patent
Sprache:eng
Schlagworte:
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