SYSTEMS AND METHODS FOR ENHANCING RELIABILITY OF MEMS DEVICES

SYSTEMS AND METHODS FOR ENHANCING RELIABILITY OF MEMS DEVICES

A micro-electromechanical system (MEMS) device that in one embodiment includes at least two MEMS switches coupled to each other in a back-to-back configuration. The first and second suspended elements corresponding to first and second MEMS switches are electrically coupled. Further, first and second...

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Hauptverfasser: GO STEVEN YUEHIN, AIMI MARCO FRANCESCO, KEIMEL CHRISTOPHER FRED, IANNOTTI JOSEPH ALFRED
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRICITY
RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
WAVEGUIDES
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creator GO STEVEN YUEHIN
AIMI MARCO FRANCESCO
KEIMEL CHRISTOPHER FRED
IANNOTTI JOSEPH ALFRED
description A micro-electromechanical system (MEMS) device that in one embodiment includes at least two MEMS switches coupled to each other in a back-to-back configuration. The first and second suspended elements corresponding to first and second MEMS switches are electrically coupled. Further, first and second contacts corresponding to the first and second MEMS switches are configured such that a differential voltage between the second suspended element and the second contact is approximately equal to a differential voltage between the first suspended element and the first contact. The MEMS device includes at least one actuator coupled to one or more of the first and second suspended elements to actuate one or more of the first and the second suspended elements. In one example, the MEMS device includes one or more passive elements coupled to one or more of the first and second MEMS switches.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRICITY
RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
WAVEGUIDES
title SYSTEMS AND METHODS FOR ENHANCING RELIABILITY OF MEMS DEVICES
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