Process Module for the Inline-Treatment of Substrates

The present invention relates to an apparatus and a method for the fluidic inline-treatment of flat substrates with at least one process module. In particular, the invention relates to such a treatment during the gentle and controlled transport of the substrates, wherein the treatment can also just...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KALTENBACH KONRAD, SCHWAB MARIO, SCHWAB GUENTER, SOLLINGER FRANZ, HERMANN LOTHAR, SCHIENLE FRANK, HAMID RAHIM, BUSCHHARDT THOMAS, FEIJOO DIEGO
Format: Patent
Sprache:eng
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