Dual Stage Voltage Ramp Stress Test for Gate Dielectrics

Dual Stage Voltage Ramp Stress Test for Gate Dielectrics

A testing system for testing the integrity of a gate dielectric includes a testing apparatus, the testing apparatus including a test probe configured to contact and provide a voltage across the gate dielectric and to measure a current passing through the gate dielectric. The testing system also incl...

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Hauptverfasser: BROCHU, JR. DAVID G, RAHIM NILUFA, LAROW CHARLES B, MERRILL TRAVIS S, DUFRESNE ROGER A, WU ERNEST Y
Format: Patent
Sprache:eng
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MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator BROCHU, JR. DAVID G
RAHIM NILUFA
LAROW CHARLES B
MERRILL TRAVIS S
DUFRESNE ROGER A
WU ERNEST Y
description A testing system for testing the integrity of a gate dielectric includes a testing apparatus, the testing apparatus including a test probe configured to contact and provide a voltage across the gate dielectric and to measure a current passing through the gate dielectric. The testing system also includes a computing device coupled to the testing apparatus an causing the testing apparatus to apply a constant voltage as part of a first test to the gate dielectric through the test probe until a first predetermined current is measured passing through the gate dielectric and to apply an increasing voltage to the gate dielectric after the first predetermined current is measured.
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Dual Stage Voltage Ramp Stress Test for Gate Dielectrics
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