ENHANCED CAPACITANCE TRENCH CAPACITOR

An integrated circuit including a trench capacitor has a semiconductor region in which a material composition varies in a quantity of at least one component therein such that the quantity alternates with depth a plurality of times between at least two different values. For example, a concentration o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NORUM JAMES P, NAEEM MUNIR D, CHENG KANGGUO, KIM BYEONG Y
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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