APPARATUS FOR COOLING SAMPLES DURING ION BEAM PREPARATION

The invention relates to a cooling apparatus (101) for a sample in an ion beam etching process, including, a sample stage (102) for arranging the sample, a coolant receptacle (120) containing a coolant, at least one thermal conduction element (106a, 106b) that connects the sample stage (102) to the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WOGRITSCH RAINER, PFEIFER THOMAS
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OFGENERAL APPLICATION HEAT EXCHANGE IN GENERAL HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS,IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT HEATING LIGHTING MECHANICAL ENGINEERING WEAPONS
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