MICROELECTROMECHANICAL STRUCTURE (MEMS) MONITORING

MICROELECTROMECHANICAL STRUCTURE (MEMS) MONITORING

A MEMS component is monitored to determine its status. Sensors are deployed to sense the MEMS component and produce detection signals that are analyzed to determine the MEMS component state. An indicator device alerts a user of the status, particularly if the MEMS component has failed. Additionally,...

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Hauptverfasser: EBBERS JONATHAN P, TWOMBLY PETER A, GOODNOW KENNETH J, SHUMA STEPHEN G
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator EBBERS JONATHAN P
TWOMBLY PETER A
GOODNOW KENNETH J
SHUMA STEPHEN G
description A MEMS component is monitored to determine its status. Sensors are deployed to sense the MEMS component and produce detection signals that are analyzed to determine the MEMS component state. An indicator device alerts a user of the status, particularly if the MEMS component has failed. Additionally, the MEMS component monitoring system may be practiced as a design structure encoded on computer readable storage media as part of a circuit design system.
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title MICROELECTROMECHANICAL STRUCTURE (MEMS) MONITORING
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