SEMICONDUCTOR DEVICE

A semiconductor device includes a first insulating film formed between a gate electrode and a first flat semiconductor layer, and a sidewall-shaped second insulating film formed to surround an upper sidewall of a first columnar silicon layer while contacting an upper surface of the gate electrode an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ARAI SHINTARO, SINGH NAVAB, BUDDHARAJU KAVITHA DEVI, NAKAMURA HIROKI, NANSHENG SHEN, KUDO TOMOHIKO, SAYANTHAN RUKMANI DEVI, MASUOKA FUJIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!