CLEANING AND DRYING METHOD AND APPARATUS

A cleaning liquid is pressurized and superheated to a condition, in which temperature of the cleaning liquid is above an atmospheric boiling point. A product to be cleaned is interposed between a pair of liquid holding blocks, so that gaps are respectively formed between side surfaces of the product...

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Bibliographische Detailangaben
1. Verfasser: YANAGAWA KEITA
Format: Patent
Sprache:eng
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