METHOD FOR PRODUCING SEMICONDUCTING INDIUM OXIDE LAYERS, INDIUM OXIDE LAYERS PRODUCED ACCORDING TO SAID METHOD AND THEIR USE

The present invention relates to a process for producing semiconductive indium oxide layers, in which a substrate is coated with a liquid, anhydrous composition comprising a) at least one indium alkoxide and b) at least one solvent, optionally dried and thermally treated at temperatures greater than...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	THIEM HEIKO, HOPPE ARNE, STEIGER JUERGEN, MERKULOV ALEXEY, DAMASCHEK YVONNE, PHAM DUY VU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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