TECHNIQUE TO DETERMINE MIRROR POSITION IN OPTICAL INTERFEROMETERS

A Micro Electro-Mechanical System (MEMS) interferometer system utilizes a capacitive sensing circuit to determine the position of a moveable minor. An electrostatic MEMS actuator is coupled to the moveable minor to cause a displacement thereof. The capacitive sensing circuit senses the current capac...

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Bibliographische Detailangaben
Hauptverfasser:	MEDHAT MOSTAFA, SAADANY BASSAM A, HAFEZ AMR N, HADDARA HISHAM
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A Micro Electro-Mechanical System (MEMS) interferometer system utilizes a capacitive sensing circuit to determine the position of a moveable minor. An electrostatic MEMS actuator is coupled to the moveable minor to cause a displacement thereof. The capacitive sensing circuit senses the current capacitance of the MEMS actuator and determines the position of the moveable minor based on the current capacitance of the MEMS actuator.