INTERFEROMETRIC MODULATOR IN TRANSMISSION MODE

A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GANTI SURYA, KHAZENI KASRA, SAMPSELL JEFF
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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